A highly reliable getter heater structure and preparation method 

A highly reliable getter heater structure and preparation method

The present invention is a structure and preparation method of getter heaters, which is characterized in that the coarse hot wire has one or more intermittent grooves in the connecting part; the fine hot wire is partially wound on the coarse hot wire, and the part wound on the coarse hot wire is partially or wholly embedded in the groove of the coarse hot wire; It is covered with an insulating layer in the area of the fine hot wire, the connecting part and the coarse hot wire.

Advantages:

The thick and thin hot wires are connected by winding, can avoid defects such as poor contact, fracture, fusing that may be brought by the usual welding connection mode, and improve the reliability of the heater.