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Non Evaporable Getter (NEG) Pumps

Features and Applications NEG pump is a kind of chemisorption pump, which assembled after the NEG alloy heated by high sintering, It could eliminates large amounts of residual gases in a vacuum environment, mainly applied for UHV testing or Lab equipment. When it’s activated NEG pumps co...

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Description

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Features and Applications

NEG pump is a kind of chemisorption pump, which assembled after the NEG alloy heated by high sintering, It could eliminates large amounts of residual gases in a vacuum environment, mainly applied for UHV testing or Lab equipment. When it’s activated NEG pumps could operating without power, also free of Vibration and Nonmagnetic. The highlight of the NEG pumps it's extremely effective for Hydrogen and other active gases, and would never reduce under the UHV.

Basic Characteristics and General Data

Product Type	length of Cartridge (mm)	Getter Weight (g)	Flange size	Activation Power(W)	Activation Temperature (℃)	Reactivations (sorption cycles)
NP-TMKZ-100	62	18	CF35	25	450	≥100
NP-TMKZ-200	88	35	CF35	45	450	≥100
NP-TMKZ-400	135	70	CF35	85	450	≥100
NP-TMKZ-1000	142	180	CF63	220	450	≥100
NP-TMKZ-1600	145	420	CF100/CF150	450	450	≥100
NP-TMKZ-2000	195	630	CF100/CF150	680	450	≥100

Product Type	Pumping Speed(L/S)				Sorption Capacity (Torr × L)
	H2	H2O	N2	CO	H2	H2O	N2	CO
NP-TMKZ-100	100	75	25	45	600	5	0.175	0.35
NP-TMKZ-200	200	145	45	90	1160	10	0.35	0.7
NP-TMKZ-400	400	290	95	180	1920	20	0.7	1.4
NP-TMKZ-1000	800	580	185	360	5600	50	1.7	3.5
NP-TMKZ-1600	1600	1160	370	720	11520	120	4	8
NP-TMKZ-2000	2000	1450	450	900	17280	180	6	12

Recommended activation conditions

It is recommended that the user use a constant current power supply to energize and activate the NEG Pump. Recommended activation conditions: Energizing activation at 450°C for 45min, the vacuum degree of the system in the whole process of activation should be better than 0.01Pa. Proper extension of the time will facilitate full activation of the NEG Pump. If the standard activation temperature cannot be reached, the activation time must be extended to compensate. It is necessary to ensure the vacuum degree of the vacuum chamber during the activation process, if the vacuum is too low, the following defects may occur: heater sputtering, suction material pollution, abnormal activation temperature and other adverse conditions.

The NEG Pump releases a certain amount of gases during activation, in order to ensure the vacuum degree during the activation of the NEG Pump. We recommend that the NEG Pump should be activated under dynamic vacuum, and the activation process should be slowly and gradually increased from 1.5A until the predetermined current value is reached, the rapid deflation and the change of electrical parameters caused by the rapid change of the temperature of the NEG Pump must be avoided.

Caution

When activated and working, the NEG Pump casing and flange have a high temperature, pay attention to prevent burns.

When the NEG Pump is at high temperature, it must be in vacuum conditions to avoid failures due to contamination and consumption.

When connecting the power supply, ensure that the connection between the power supply and the flange electrode is firm, and pay attention to the insulation with other parts.

Before heating activation, pay attention to ensure that the system is under vacuum conditions that meet the requirements.

Under special circumstances, in order to make the NEG Pump have a high pumping speed for C, N, O and other gases, the working temperature can be maintained in the range of 200 °C ~ 250 °C (energized 2.5A), in this case the ultimate vacuum degree that the NEG Pump can achieve is reduced.

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Non Evaporable Getter (NEG) Pumps

Description

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Features and Applications

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